Equipment

KLA VisEdge CV300

Vintage: June 2007
Wafer Size: 300mm
Configuration:
1. Main Body
l Monitor, Keyboard, Trackball Mouse
l CANDELA (ADC MUX)
l System computer – HDD, CD Rom Drive
l Pneumatic module
l Motion control unit
l System power box
l Stage unit (12”)
2. EFEM
l Port #1, Port #2
l Robot ass’y (YASKAWA XU-RCM 9206)
l Robot arm
l PreAligner
l Interlock controller
l AC/DC power controller
l NCX 100 units

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