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ASML (HMI) eP3xp
Wafer Size: 12”
S/N: L 03110
MFG: 28 Sep. 2012
Configuration: 1 Chamber, 2 Load Port
Wafer Size: 12”
S/N: L 03110
MFG: 28 Sep. 2012
Configuration: 1 Chamber, 2 Load Port
